Division Head

Prof. Nilton Itiro Morimoto
E-mail: morimoto@lsi.usp.br

Group Heads

Integrated Sensors Group

Prof. Edgar Charry Rodrigues ( charry@lsi.usp.br)

Micromechanichal Structures Group

Prof. Rogério Furlan ( furlan@lsi.usp.br)

Patterning Processes Group

Prof. Patrick Bernard Verdonck ( patrick@lsi.usp.br)
Prof. Antonio Carlos Seabra ( acseabra@lsi.usp.br)

Thin Films Group

Prof. Nilton Itiro Morimoto ( morimoto@lsi.usp.br)
Prof. Armando Antonio Maria Laganá ( lagana@lsi.usp.br)

Surface Engineering Group

Prof. Sebastião Gomes dos Santos ( seba@lsi.usp.br)

SOI CMOS Devices Group

Prof. João Antonio Martino ( martino@lsi.usp.br)

Diffractive Optics and Micro-Optics Group

Prof. Nilton Itiro Morimoto ( morimoto@lsi.usp.br)

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Last Update (29/08/00)