International
Publications (1997)
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"The formation of cobalt silicide in two thermal
stages", E. W. Simões, R. Furlan e J. J. Santiago-Aviles, Proceedings
of The Fourteenth International VLSI Multilevel Interconnection Conference
(VMIC), Santa Clara, CA, junho de 1997, p. 268 - 70.
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"Dopant redistribution during the formation
of cobalt silicide using two thermal stages", E. W. Simões, R. Furlan
e J. J. Santiago-Aviles, Proceedings of The Fourteenth International VLSI
Multilevel Interconnection Conference (VMIC), Santa Clara, CA, junho de
1997, p. 446.
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"Development of a silicon microprobe for NO
detection", M. B. A. Fontes, J. J. Santiago-Aviles e R. Furlan, Proceedings
of SPIE - Micromachining and Microfabrication Process Technology III, Edited
by Shich-Chia and Chang Stella W. Pang, 29-30 September 1997, Austin, Texas,
p. 64-71.
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"Fabrication process of free-standing polysilicon
microfilaments using PECVD silicon oxide as a sacrificial layer", E. W.
Simões, R. Furlan, N. I. Morimoto, O. Bonnaud, A. N. R. da Silva
e M. L.Pereira da Silva, Technical Digest, MME’97 (Micromechanics Europe
1997), Eighth Workshop on Micromachining, Micromechanics & Microsystems,
Southampton, U.K., 31 August - 2 September 1997, p. 47-50.
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"An architecture for a 12 Bits Resulution,
Low Power Consumption and Fully Integrated CMOS Piezoresisitive Pressure
Sensor with Thermal Compensation", F. Chavez, A. Olmos, R. Nogueira, E.
Charry, C. Azeredo-Leme, Proceeding of the VLSI’97, IX IFIP International
Conference on Very Large Scale Integration.august 26-30 1997, Gramado-Brasil.
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“Tetragonal BaTiO3 Thin Films hydrothermally
Grown on TiO2 Single Crystals”, V. M. Fuenzalida, J. G. Lisoni, N. I. Morimoto
and J. C. Acquadro, Applied Surface Science, 108, pp.385-9, 1997
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“Deposition of Thick TEOS PECVD Silicon Oxide
Layer for integrated Optical Waveguide Application”, D. A. P. Bulla e N.
I. Morimoto, IUMRS-ICA-97, September 16-18, 1997, Chiba, Japan
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“A Mechanism for electroless Cu plating onto
Si”, S. G. dos Santos Filho, A. A. Pasa and C. M. Hasenack, Microelectronic
Engineering, 33, pp.149-155, 1997.
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“Electroless and electro-plating of Cu on
Si”, S. G. dos Santos Filho, L.F.O. Martins, P.C.T. D’Ajello, A.A. Pasa,
C.M. Hasenack, Microelectronic Engineering, 33 pp. 59-64, 1997.
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“Electrochemical evidence of a copper-induced
etching of n-type Si in dilute hydrofluoric acid solutions”, L.F.O. Martins,
L. Seligman, S.G. dos Santos Filho, P.C.T. D’Agello, C. M. Hasenack and
A.A. Pasa., Journal of the Electrochemica Society, 144, pp.107-108, 1997.
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“A New Method For Determination of The Fixed
Charge Density at the Buried Oxide/Underlying Substrate Interface in SOI
MOSFETs”, M.A. Pavanello and J. A. Martino, aceito para publicação
no VIII SOI Symposium da 192nd Electrochemical Society Meeting, Paris,
agosto, 1997.
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”Analytical Modeling of the Substrate Effect
on Accumulation-Mode SOI pMOSFETs at Room Temperature and at 77 K”, M.A.
Pavanello, J. A. Martino and J. P. Colinge, Microelectronic Engineering,
vol. 36, p. 375, 1997.
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“Improved Channel Length and Series Resistance
Extraction for Short-Channel MOSFETs Suffering from Mobility Degradation”,
A.S. Nicolett, J. A. Martino, E. Simoen and C. Claeys, Journal of Solid-State
Devices and Circuits, Vol. 05, n. 01, p. 01, 1997.
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“A Simple Technique to Reduce the Influence
of the Series Resistance on the BULK and SOI MOSFET Parameter Extraction”,
A.S. Nicolett and J. A. Martino, Journal of Solid-State Devices and Circuits,
Vol. 05, n. 01, p. 05, 1997.
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”Substrate Influences on Fully Depleted Enhancement
Mode SOI MOSFETs at Room Temperature and at 77 K”, M. A. Pavanello, J.
A. Martino and J. P. Colinge, Solid State Electronics, vol. 41, n. 1, p.
111, 1997.
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“Simple Method to Extract the Length Dependent
Mobility Degradation Factor at 77 K”, A.S. Nicolett, J. A. Martino, E.
Simoen and C. Claeys, aceito para publicação no 191th Electrochemical
Society Meeting, Montreal, Canada, maio, 1997.
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“Mechanisms of Surface Roughness Induced in
Silicon by Fluorine Containing Plasmas”, R.D. Mansano, P. Verdonck, H.S.
Maciel, Aceito para publicação em Thin Solid Films/Vacuum
(1997)
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“Silicon wall profiles generated by isotropic
dry etching processes”, R.D. Mansano, P. Verdonck, H.S. Maciel, Proceedings
of the 11th international colloquium on plasma processes, pp 45-48, Le
Mans, França, maio 1997.
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“Performance characterisation of a RIE reactor
with a built-in RF excitation coil”, M. Massi, R.D. Mansano, P. Verdonck,
H.S. Maciel, M.B. Pisani, G.A. Cirino, Aceito para apresentação
no 44th National Symposium of the American Vacuum Society, San Jose, CA,
outubro 1997.