International
Publications (1993)
-
"Simple Method for the Determination of the
Interface Trap Densit at 77K in Fully Depleted Accumulation Mode SOI MOSFETS",
J.A. Martino, E. Simoen, A.L.P. Rotondaro, U. Magnusson and C. Clayers,
Solid State Electronics, Vol.36, nº 6, 1993.
-
"Rapid Titanium Silicidation: A Comparative
Study of two RTA Reactors", M.B.A. Fontes, J.C.A. Quacchia, R. Furlan,
J.J.S. Aviles, Materials Research Society Symposium Proceedings, Vol. 303,
Rapid Thermal and Integrated Processing II, 1993, 95- 101.
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"A low frequency remote plasma rapid thermal
CVD system with face down electrostatic clamp wafer holder", M.J.C. Bonfim,
J.W. Swart, C.E.M. Velasco, J.H. Okura, P.B. Verdonck, Proceedings of the
1993 M.R.S. Spring Meeting, pp 407-412 San Francisco CA, April 1993.
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"Reactive ion etching and plasma etching of
tungsten", P. Verdonck, G. Braseur, J.W. Swart, Microelectronic Engineering,
vol 21, 329 - 332 (1993)
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”Development of a W-Etchback process for plug
formation in a Tegal Hre- reactor”, P. De Geyter, M. Lux, P. Verdonck,
L. Van den hove, Tuan B. Pham, 1993 Tegal European Plasma Seminar
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“TEM Investigation of Ion beam synthesized
buried FeSi2 in silicon”, J. T. dos Santos, H. Bender, A. Lauwers, K. Maex
and M. Van Rossum, Inst. Phy, Conference Ser. 134, 181, 1993
-
“Iterative design of real-time phase holograms
in liquid crystal television”, L. Gonçalves Neto and Y. Sheng, OSA’93
Annual Meeting, Toronto, (1993).
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